Li-doped iron oxide thin films deposited on a porous ceramic substrate by a liquid-phase method (LPD) were investigated as humidity sensors. Large variations in the resistance, up to about 4-5 order of magnitude, were observed by changing the relative humidity (RH) between 10 and 90%. The investigated sensors show a quick and reversible response to cyclic variations in the RH. The effects of pretreatment and Li content were investigated. The role of Li on the response to water vapour of iron oxide thin films is discussed.

Humidity Sensing Properties of Li-Iron Oxide Based-Thin Films

PACE, Calogero;
2001-01-01

Abstract

Li-doped iron oxide thin films deposited on a porous ceramic substrate by a liquid-phase method (LPD) were investigated as humidity sensors. Large variations in the resistance, up to about 4-5 order of magnitude, were observed by changing the relative humidity (RH) between 10 and 90%. The investigated sensors show a quick and reversible response to cyclic variations in the RH. The effects of pretreatment and Li content were investigated. The role of Li on the response to water vapour of iron oxide thin films is discussed.
2001
Humidity sensors; Thin films; Iron oxide; Li-doped iron oxide
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.11770/145868
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