Thin films of mixed Ta and Re oxides have been produced by reactive dc magnetron co-sputtering of pure Ta and Re metal targets in Ar-O2atmosphere. The structural evolution of these films has been studied as a function of the composition, starting from a pure tantalum oxide film up to about 82% rhenium content. The composition and the structure of the films have been investigated by using X-ray diffraction and micro-Raman spectroscopy. For low Re content (20%), islands of a well crystallized phase, based on ReO4groups, appear in the films still composed by pure amorphous tantalum oxide, while a mixed disordered solid phase is found for the highest Re concentration (82%). © 2006 Elsevier B.V. All rights reserved.

Structural characterization of mixed Ta-Re oxide films

Cazzanelli, E.;Castriota, M.
2006-01-01

Abstract

Thin films of mixed Ta and Re oxides have been produced by reactive dc magnetron co-sputtering of pure Ta and Re metal targets in Ar-O2atmosphere. The structural evolution of these films has been studied as a function of the composition, starting from a pure tantalum oxide film up to about 82% rhenium content. The composition and the structure of the films have been investigated by using X-ray diffraction and micro-Raman spectroscopy. For low Re content (20%), islands of a well crystallized phase, based on ReO4groups, appear in the films still composed by pure amorphous tantalum oxide, while a mixed disordered solid phase is found for the highest Re concentration (82%). © 2006 Elsevier B.V. All rights reserved.
2006
Raman spectroscopy; Rhenium oxide; Tantalum oxide; XRD; Chemistry (all); Materials Science (all); Condensed Matter Physics
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.11770/284655
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