Impact of the interfacial layer on the low-frequency noise (1/f) behavior of MOSFETs with advanced gate stacks

Crupi, Felice; Srinivasan, P; Magnone, P; Simoen, E; Pace, Calogero; Misra, D; Claeys, C.

doi:10.1109/LED.2006.879028

The impact of the interfacial layer thickness on the low-frequency (LF) noise (1/f noise) behavior of n- and p-channel MOSFETs with high-k gate dielectrics and metal gates is investigated. Decreasing the interfacial layer thickness from 0.8 to 0.4 nm affects the 1/f noise in two ways. 1) The mobility fluctuations mechanism becomes the main source of IN noise not only on pMOS devices, as usually observed, but also on nMOS devices. 2) A significant increase of the Hooge's parameter is observed for both types of MOSFETs. These experimental findings indicate that bringing the high-k layer closer to the Si-SiO2 interface enhances the 1/f noise mainly due to mobility fluctuations.

The impact of the interfacial layer thickness on the low-frequency (LF) noise (1/f noise) behavior of n- and p-channel MOSFETs with high-kappa, gate dielectrics and metal gates is investigated. Decreasing the interfacial layer thickness from 0.8 to 0.4 nm affects the 1/f noise in two ways. 1) The mobility fluctuations mechanism becomes the main source of IN noise not only on pMOS devices, as usually observed, but also on nMOS devices. 2) A significant increase of the Hooge's parameter is observed for both types of MOSFETs. These experimental findings indicate that bringing the high-kappa, layer closer to the Si-SiO2 interface enhances the 1/f noise mainly due to mobility fluctuations.

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Titolo:	Impact of the interfacial layer on the low-frequency noise (1/f) behavior of MOSFETs with advanced gate stacks
Autori:	CRUPI, Felice Srinivasan P Magnone P Simoen E PACE, Calogero Misra D Claeys C. mostra contributor esterni nascondi contributor esterni
Data di pubblicazione:	2006
Rivista:	IEEE ELECTRON DEVICE LETTERS
Handle:	http://hdl.handle.net/20.500.11770/151442
Appare nelle tipologie:	1.1 Articolo in rivista

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http://hdl.handle.net/20.500.11770/151442

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