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EnglishThis paper focuses on the time-dependent breakdown of the AlGaN/GaN Schottky barrier diodes with a gated edge termination (GET) submitted to high-voltage stress. The impact of the GET structure, the passivation layer thickness, and a preclean process (sulfuric acid and hydrogen peroxide mixture + ammonia and hydrogen peroxide mixture) before the GET layer deposition on the time to breakdown tBD is analyzed. Initially, a reference structure with a single-GET structure, a thick passivation layer and excellent performance under dc, and pulse characterization is submitted to stress. The results show that the time to failure follows a Weibull distribution with high shape parameter values (β ∼ 3 and/or β ∼ 5) related to intrinsic failure mechanisms. The exponential dependence of tBD on the stress voltage suggests a degradation driven by the electric field, while lower thermal activation energies indicate that temperature acts as a weak acceleration factor. A more uniform distribution of the electric field - by adding an additional peak (double-GET structure) or with more equilibrated peaks (thin passivation structure) - and a more aggressive preclean process before the GET layer deposition improves the breakdown voltage and prolongs the device lifetime.
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| Titolo: | Reliability improvements in AlGaN/GaN schottky barrier diodes with a gated edge termination |
| Autori: | |
| Data di pubblicazione: | 2018 |
| Rivista: | |
| Handle: | http://hdl.handle.net/20.500.11770/290930 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
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